Piezo Actuators' Mechanisms XY200M
| Description: | The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes. |
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| Performance: | Max No-load displacement (µm): 200; Dimensions (mm): 22*100*100; Resolution (nm): 2.0; Unloaded resonance frequency (Hz): 580; | |
| Available options: | Strain Gauges; Eddy Current Sensors, Vacuum | |
| Status: | Standard |
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