Piezo Actuators' Mechanisms
Mainly based on the APA® concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers' requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA® concept offering a reliable, robust, precise and compact solution to its users.
Description:
The double tilt translator DTT is based on 2 pairs of APA 35XS. Three types of movement can be generated Z (translation), X and Y (tilt).
Performance:
Max No-load displacement(µm): 35; Angular displacement(mrad): 2.8;Dimensions(mm):Ø45*24; Angular Resolution(µrad): 0.02; Unloaded resonance frequency(Hz): 3200;
Available options:
Strain gages, Vacuum, Eddy current sensor
Status:
Preliminary
Description:
The Fast Piezo shutter developped by CEDRAT TECHNOLOGIES in collaboration with EMBL (Dr. Cipriani) is based on standard amplified piezo actuators with a special optical head. It provides a compact and low jitter shutter solution for X ray beam.
Performance:
Max No-load displacement (µm): 400; Dimensions (mm): 21*60*44; Unloaded resonance frequency (Hz): 900; Response time (ms): 0,56
Available options:
Strain Gages; Vacuum; Slits in Tungstene alloy
Status:
Standard
Description:
The FPS400M (derived from FPS200M) is based on standard amplified piezo actuators APA 400M with a special optical head. The FPS 400M is a compact, low jitter and high stroke shutter solution.
Performance:
Max No-load displacement (µm): 800; Dimensions (mm): 21*60*44; Unloaded resonance frequency (Hz): 495; Response time (ms): 1,01
Available options:
Strain Gauges, Vacuum, Slits in Tungstene alloy, Double slits in Tungstene alloy
Status:
Standard
Description:
The FPS900M (derived from FPS200M and 400M) is based on standard amplified piezo actuators APA 900M with a special optical head. The FPS 900M is a compact, low jitter and high stroke shutter solution.
Performance:
Aperture (µm): 1100; Dimensions (mm): 21*60*44; Unloaded resonance frequency (Hz): 248; Opening & Closing Time(ms): 10ms
Available options:
Strain Gauges, Vacuum, Slits in Tungstene alloy, Double slits in Tungstene alloy
Status:
Standard
Description:
Linear Stepping Piezo Actuators (LSPA) are linear piezo motors for micro/nano positioning applications They operate by accumulation of small steps.
Performance:
Long stroke(mm) 10.0; Mass (g): 30; Base size (mm):16*16; Max speed(mm/s): 30; Blocking force at rest(N):3;
Available options:
Status:
Standard
Description:
The objective piezo positionner OPP120SM is using the amplified piezo actuator from CEDRAT TECHNOLOGIES standard range of actuator and an additional guiding to move vertically and accurately the objective.
Performance:
Max No-load displacement(µm): 140; Dimensions(mm): 50*65*40; Resonance frequency(Hz): 440; Response time(ms): 1,1
Available options:
Strain Gauges, Eddy Current Sensors, Vacuum
Status:
Standard
Description:
Rotary Stepping Piezo Actuators (RSPA) are rotary piezo motors with 360° revolutions. They operate by accumulation of small steps.
Performance:
Typical max loading:15gr; Typical working frequency:2300Hz; Height: 10mm;Diameter:12 mm; Mass 1,9g
Available options:
Status:
Standard
Description:
The Stepping Piezo Stage SPS35XS is based on the Stepping Piezo Actuator's principle. It provides a long stroke and a micro/nano positioning resolution.
Performance:
Max no-load displacement (mm): 5; Dimensions (X&Y axis): 30*30 (mm);Resolution: 35; Unloaded resonance frequency (Hz): 200; Response time: 2.50
Available options:
Status:
Preliminary
Description:
The tilt translator is based on 2 APA 60SM actuators. Two types of movement can be generated: translation and tilt.
Performance:
Max No-load displacement(µm): 80; Angular displacement(mrad): 11; Dimensions(mm): Ø55*35; Angular Resolution(µrad): 0,1; Unloaded resonance frequency(Hz): 3000;
Available options:
Strain Gages; Vacuum
Status:
Standard
Description:
The piezoelectric stage X120S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performance:
Max No-load displacement(µm):115; Heigth (mm): 12; Dimensions (mm):30*30; Unloaded resonance frequency(Hz): 1200; Response time: 0.42
Available options:
Strain gauges, Vacuum
Status:
Preliminary
Description:
The piezoelectric stage X60S has a stroke up to 110µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
Performance:
Max No-load displacement(µm):55; Heigth (mm): 12; Dimensions (mm):30*30; Unloaded resonance frequency(Hz): 600; Response time: 0.83
Available options:
Strain gauges, Vacuum
Status:
Preliminary
Description:
The piezoelectric stage XY200M is based on the APA 200M actuators and posseses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
Performance:
Max No-load displacement (µm): 200; Dimensions (mm): 22*100*100; Resolution (nm): 2.0; Unloaded resonance frequency (Hz): 580;
Available options:
Strain Gauges; Eddy Current Sensors, Vacuum
Status:
Standard
Description:
The piezoelectric stage XY25XS is based on the APA 25XS actuators. The compact XY25XS stage is well suited to integrated devices for fiber positioning, micro scanning.
Performance:
Max displacement (µm): 25; Dimensions (mm): 20*50*50; Unloaded resonance frequency (Hz): 3000;
Available options:
Strain Gauges, Vacuum, Eddy current sensor
Status:
Standard
Description:
The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection
Performance:
Max no load displacement (µm): 180; Height(mm): 44; Dimensions (mm): 100*100; Resolution (nm): 1,8; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32
Available options:
Strain Gages; Eddy Current Sensors, Vacuum
Status:
Standard
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