Piezo Actuators' Mechanisms XYZ200M
| Description: | The piezoelectric stage XYZ200M is based on APA 200M actuators and posseses a high stiffness. Applications include confocal microscopy, mask positioning, inspection |
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| Performance: | Max no load displacement (µm): 180; Height(mm): 44; Dimensions (mm): 100*100; Resolution (nm): 1,8; Unloaded resonance frequency (Hz): 380; Response time (ms): 1,32 | |
| Available options: | Strain Gages; Eddy Current Sensors, Vacuum | |
| Status: | Standard |
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